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Micro mechanical systems : principles and technology /

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In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution...

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Bibliographic Details
Corporate Author: ScienceDirect (Online service)
Other Authors: Fukuda, T. (Toshio), 1948-, Menz, W. (Wolfgang)
Format: eBook
Language:English
Language Notes:English.
Published: Amsterdam ; New York : Elsevier, 1998.
Series:Handbook of sensors and actuators ; v. 6.
Subjects:
Microelectromechanical systems > Handbooks, manuals, etc.
Microsystèmes électromécaniques > Guides, manuels, etc.
TECHNOLOGY & ENGINEERING > Mechanical.
Microelectromechanical systems
Mikromechanik
Mikrosystemtechnik
Tecnologia.
Engenharia eletrônica.
Microactionneurs.
Microtechniques.
Micromécanique (ingénierie)
Electronic books.
Handbook
handbooks.
Handbooks and manuals
Handbooks and manuals.
Guides et manuels.
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Holdings details from Available Online
Call Number: TJ163 .M48 1998eb
 
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TJ163 .M48 1998eb Available