Materials science in microelectronics /
The subject matter of thin-films which play a key role in microelectronics divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationsh...
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| Format: | eBook |
| Language: | English |
| Published: |
Amsterdam ; Boston :
Elsevier,
2005-
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| Edition: | 2nd ed. |
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| Online Access: | Connect to the full text of this electronic book Connect to the full text of this electronic book |
| Summary: | The subject matter of thin-films which play a key role in microelectronics divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following: Electrical properties Magnetic properties Optical properties Mechanical properties Mass transport properties Interface and junction properties Defects and properties * Captures the importance of thin films to microelectronic development * Examines the cause / effect relationship of structure on thin film properties. |
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| Physical Description: | 1 online resource (volumes <1>) |
| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 9780080446394 0080446396 9780080446400 008044640X 0080459609 9780080459608 |