Materials science in microelectronics /

The subject matter of thin-films which play a key role in microelectronics divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationsh...

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Bibliographic Details

Main Author:	Machlin, E. S.
Corporate Author:	ScienceDirect (Online service)
Format:	eBook
Language:	English
Published:	Amsterdam ; Boston : Elsevier, 2005-
Edition:	2nd ed.
Subjects:	Thin films. Microelectronics. Miniaturization Couches minces. Microélectronique. microelectronics. Microelectronics Thin films Electronic books.
Online Access:	Connect to the full text of this electronic book Connect to the full text of this electronic book