Principles of physical vapor deposition of thin films /
The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered...
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| Format: | eBook |
| Language: | English |
| Language Notes: | English. |
| Published: |
Amsterdam ; Boston ; London :
Elsevier,
2006.
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| Edition: | 1st ed. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Summary: | The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered essential to become knowledgeable in thin film depostition techniques. Its ultimate goal as a reference is to provide the foundation upon which thin film science and technological innovation are possible. Offers detailed derivation of important formulae. Thoroughly covers the basic principles of materials science that are important to any thin film preparation. Careful attention to terminologies, concepts and definitions, as well as abundance of illustrations offer clear support for the text. |
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| Physical Description: | 1 online resource (xi, 1160 pages) : illustrations |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9780080446998 008044699X 9780080480312 0080480314 1281052248 9781281052247 9786611052249 6611052240 |