Principles of physical vapor deposition of thin films /

The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered...

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Bibliographic Details
Main Author: SreeHarsha, K. S.
Corporate Author: ScienceDirect (Online service)
Format: eBook
Language:English
Language Notes:English.
Published: Amsterdam ; Boston ; London : Elsevier, 2006.
Edition:1st ed.
Subjects:
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Call Number: QC176.83 .S68 2006eb
 
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QC176.83 .S68 2006eb Available