Surfaces and their measurement /

The importance of surface metrology has long been acknowledged in manufacturing and mechanical engineering, but has now gained growing recognition in an expanding number of new applications in fields such as semiconductors, electronics and optics. Metrology is the scientific study of measurement, an...

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Bibliographic Details

Main Author:	Whitehouse, D. J. (David J.)
Corporate Author:	ScienceDirect (Online service)
Format:	eBook
Language:	English
Language Notes:	English.
Published:	London : HPS, 2002.
Subjects:	Surfaces (Technology) > Measurement. TECHNOLOGY & ENGINEERING > Nanotechnology & MEMS. Surfaces (Technology) > Measurement Electronic books. dissertations. Academic theses Academic theses. Thèses et écrits académiques.
Online Access:	Connect to the full text of this electronic book