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Interlayer dielectrics for semiconductor technologies /

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Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challe...

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Bibliographic Details
Corporate Author: ScienceDirect (Online service)
Other Authors: Murarka, S. P., Eizenberg, M. (Moshe), Sinha, A. K. (Ashok K.)
Format: eBook
Language:English
Published: Amsterdam ; Boston : Elsevier/Academic Press, 2003.
Subjects:
Semiconductor wafers.
Dielectrics.
Plaquettes à gravure en semi-conducteurs.
Diélectriques.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
Dielectrics
Semiconductor wafers
Electronic books.
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Call Number: TK7871.85 .I584 2003eb
 
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