Cover Image

PVD for microelectronics : sputter deposition applied to semiconductor manufacturing /

GENERAL DESCRIPTION OF THE SERIES Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems. In order to be able to reflect the dev...

Full description

Bibliographic Details
Main Author: Powell, Ronald A.
Corporate Author: ScienceDirect (Online service)
Other Authors: Rossnagel, Stephen M.
Format: eBook
Language:English
Language Notes:English.
Published: San Diego : Academic Press, ©1999.
Series:Thin films (San Diego, Calif.) ; v. 26.
Subjects:
Thin film devices > Design and construction.
Vapor-plating.
Thin films.
Couches minces.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
Thin film devices > Design and construction
Thin films
Vapor-plating
Física geral.
Electronic books.
Online Access:Connect to the full text of this electronic book

Internet

Connect to the full text of this electronic book

Available Online

Holdings details from Available Online
Call Number: TK7872.T55 P68 1999eb
 
Call Number Status Get It
TK7872.T55 P68 1999eb Available