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Optical diagnostics for thin film processing /

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This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during manufacturing. The key advantage of optical diagnostics in these applications is that they are usually n...

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Bibliographic Details
Main Author: Herman, Irving P.
Corporate Author: ScienceDirect (Online service)
Format: eBook
Language:English
Published: San Diego, CA : Academic Press, ©1996.
Subjects:
Thin films > Surfaces.
Spectrum analysis > Industrial applications.
Couches minces > Surfaces.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
Spectrum analysis > Industrial applications
Thin films > Surfaces
Dünne Schicht
Optische Eigenschaft
Spectroscopie > Applications industrielles.
Spectroscopie.
Thin films
Electronic books.
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Call Number: QC176.84.S93 H47 1996eb
 
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