Thin film processes II /

This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to t...

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Bibliographic Details
Corporate Author: ScienceDirect (Online service)
Other Authors: Vossen, John L., Kern, Werner, 1925-
Format: eBook
Language:English
Published: Boston : Academic Press, ©1991.
Series:Thin film processes ; 2
Subjects:
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Call Number: TK7871.15.F5 T432 1991eb
 
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TK7871.15.F5 T432 1991eb Available