Cover Image

Thin film materials technology : sputtering of compound materials /

Show other versions (2)

An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key techn...

Full description

Bibliographic Details
Main Author: Wasa, Kiyotaka
Corporate Author: ScienceDirect (Online service)
Other Authors: Kitabatake, Makoto, Adachi, Hideaki
Format: eBook
Language:English
Language Notes:English.
Published: Norwich, NY : Heidelberg : William Andrew Pub. ; Springer, ©2004.
Subjects:
Cathode sputtering (Plating process)
Thin films.
Pulvérisation cathodique > Applications industrielles.
Couches minces.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
Thin films
Electronic books.
Online Access:Connect to the full text of this electronic book

Internet

Connect to the full text of this electronic book

Available Online

Holdings details from Available Online
Call Number: TS695 .W38 2004eb
 
Call Number Status Get It
TS695 .W38 2004eb Available