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Handbook of thin-film deposition processes and techniques : principles, methods, equipment and applications /

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The 2nd edition contains new chapters on contamination and contamination control that describe the basics and the issues. Another new chapter on meteorology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers...

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Bibliographic Details
Corporate Author: ScienceDirect (Online service)
Other Authors: Seshan, Krishna
Format: eBook
Language:English
Language Notes:English.
Published: Norwich, N.Y. : Noyes Publications/William Andrew Pub., ©2002.
Edition:2nd ed.
Series:Materials science and process technology series. Electronic materials and process technology.
Subjects:
Thin film devices > Design and construction > Handbooks, manuals, etc.
Thin films > Handbooks, manuals, etc.
Chemical vapor deposition > Handbooks, manuals, etc.
Couches minces > Guides, manuels, etc.
Dépôt chimique en phase vapeur > Guides, manuels, etc.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
Chemical vapor deposition
Thin film devices > Design and construction
Thin films
Filmes finos (equipamentos)
Electronic books.
Handbook
handbooks.
Handbooks and manuals
Handbooks and manuals.
Guides et manuels.
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Call Number: TK7872.T55 H36 2002eb
 
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