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Semiconductor industrial hygiene handbook : monitoring, ventilation, equipment, and ergonomics /

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This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal...

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Bibliographic Details
Main Author: Williams, Michael E., 1949-
Corporate Author: ScienceDirect (Online service)
Other Authors: Baldwin, David G., Manz, Paul C.
Format: eBook
Language:English
Published: Park Ridge, N.J., U.S.A. : Noyes Publications, ©1995.
Series:Materials science and process technology series.
Subjects:
Semiconductor industry > Employees > Health and hygiene.
Industrial hygiene.
Semi-conducteurs > Industrie > Personnel > Santé et hygiène.
Industrial hygiene
Semiconductor industry > Employees > Health and hygiene
Semiconducteurs.
Electronic books.
Handbook
handbooks.
Handbooks and manuals
Handbooks and manuals.
Guides et manuels.
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Call Number: TK7836 .W54 1995eb
 
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TK7836 .W54 1995eb Available