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Microsystem dynamics : principles and applications /

Discover a comprehensive look at the principles and applications of microsystem dynamics Microsystems or microelectromechanical systems (MEMS) are miniaturized devices with components measured in micrometers that perform micro- to nanometer scale electronic machine functions such as actuations. Sinc...

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Bibliographic Details
Main Authors: Chen, Gang (Mechanical engineer) (Author), Xu, Jianfeng (Author)
Format: eBook
Language:English
Published: Hoboken : John Wiley & Sons, 2015.
Series:Microsystem and nanotechnology series
Subjects:
Microelectromechanical systems.
Microelectronics.
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • Preface vii
  • 1 Introduction 1
  • 1.1 Definition of Microsystem, Vibrations and Dynamics 1
  • 1.2 Engineering and Scientific Significance of Microsystem Dynamics 2
  • 1.3 Organization of the Book 4
  • 2 Vibrations and Dynamics 7
  • 2.1 Introduction 7
  • 2.2 Vibration of Linear System Under Deterministic Excitations 7
  • 2.2.1 Vibration of Linear Discrete and Continuous Systems 7
  • 2.2.2 Vibration of Linear Discrete Systems: Single-degree-of-freedom System 8
  • 2.2.3 Vibrations of Linear Discrete Systems: Multiple-degree-of-freedom System 12
  • 2.2.3.1 Eigenvalues and Eigenvectors 13
  • 2.2.3.2 Forced Vibration Solution of an MDOF System 15
  • 2.2.4 Vibrations of Continuous Systems 16
  • 2.2.4.1 Transverse Vibrations of String and Wave Equation 16
  • 2.2.4.2 Longitudinal Vibration of Rods and Torsional Vibration of Shafts 20
  • 2.2.4.3 Transverse Vibration of Beams 21
  • 2.3 Random Vibrations Under Deterministic Excitations 24
  • 2.3.1 Probability Density, Autocorrelation, and Power Spectral Density Function 25
  • 2.3.2 Response of an SDOF System to an Arbitrary Function Input 27
  • 2.3.3 Power Spectral Density Function 29
  • 2.3.4 Joint Probability Density Function and Cross-correlation Function 30
  • 2.3.5 Response of Linear Dynamic System to a Random Input 32
  • 2.4 Nonlinear Vibrations 35
  • 2.4.1 Perturbation Method, Duffing Equation 35
  • 2.4.2 Amplitude Frequency-dependent and Jump Phenomenon 39
  • 2.4.3 Van der Pol's equation 39
  • 2.4.4 Method of Variation of Parameter 40
  • 2.4.5 Phase Plot, Limit Cycles, Self-excited Oscillations, and Chaos 41
  • 2.4.6 Stability of Equilibrium 43
  • 2.4.7 Parametrically Excited System and Mathieu's Equation 46
  • 2.4.8 Transient and Nonstationary Vibrations 48
  • 2.4.9 Multi-degree-of-freedom Systems 48
  • 2.5 Advanced Dynamics 49
  • 2.5.1 Kinematics of Rigid Body 49
  • 2.5.2 Linear and Angular Momentums of Rigid Body 58
  • 2.5.3 Euler Equations of Rigid Body 59
  • 2.5.4 Lagrange Equations 60
  • 3 Surface Forces and Interface Interactions 65
  • 3.1 Introduction 65
  • 3.2 Contact Between Two Solid Surfaces 65
  • 3.2.1 Description of Surfaces 65
  • 3.2.2 Contact Mechanics of Two Solid Surfaces 67
  • 3.3 Forces Between Two Solid Surfaces 72
  • 3.3.1 Adhesion 72
  • 3.3.1.1 Solid-Solid Adhesion 72
  • 3.3.1.2 Liquid-mediated Adhesion 76
  • 3.3.2 Friction 79
  • 3.3.3 Nanoscale Contact and Friction 84
  • 4 Nanoscale Dynamics of Air-bearing Slider in Computer Hard Disk Drives 99
  • 4.1 Introduction 99
  • 4.1.1 Modern Hard Disk Drive 99
  • 4.1.2 Head-disk Interface 99
  • 4.1.3 Microsystem-based Active Slider Technology 101
  • 4.2 Dynamics of ABS in Sub-5-nm Clearance Regime 104
  • 4.2.1 Nonlinear Dynamics of Slider in Sub-5-nm Clearance Regime 104
  • 4.2.2 Multiple Interface Forces and System Modeling 106
  • 4.2.2.1 Air-bearing Slider Contact Model 108
  • 4.2.2.2 Intermolecular Force 110
  • 4.2.2.3 Electrostatic Force 111
  • 4.2.2.4 Meniscus Forces 114
  • 4.2.3 Nonlinear Dynamics Due to Nonlinear Air-bearing Stiffness and Vibro-impact 115
  • 4.3 Microsystem-based Active Slider Dynamics 119
  • 4.3.1 Microsystem-based Active Thermal Flying-height Control Slider 119
  • 4.3.2 Nanoscale Dynamics Sensing, Identification and Diagnosis 134
  • 4.3.3 Active Control of Microsystem-based-slider Vibrations 147
  • 4.3.4 Characterization of Dynamic Performance of Lubricant in Head-Disk Interface Using Molecular Dynamics 161
  • 5 Microdynamics of Lithium-ion Batteries 177
  • 5.1 Multiscale Systems in Lithium-ion Batteries 177
  • 5.1.1 Modern Lithium-ion Batteries 177
  • 5.1.2 Multiscale Characterizations of LIBs 177
  • 5.2 Microstructure and Microstructural Dynamics of LIBs 180
  • 5.2.1 Microstructure and Multiphysics System 180
  • 5.2.2 Modeling of Dynamics of LIBs 186
  • 5.2.2.1 Equivalent Circuit Models 187
  • 5.2.2.2 Electrochemical Model 189
  • 5.2.3 Microstructural Dynamics of Particles in LIBs 191
  • 5.3 Acoustic Emission Diagnosis of Microscale Damages of LIBs 196
  • 5.3.1 Detection of Damages in LIBs Using AE Testing 196
  • 5.3.2 Evaluation of Microcracking in LIBs 197
  • 5.3.3 Diagnosis and Identification of Microscale Damages of LIBs 202
  • 6 Dynamics of Actuator in Microsystems 213
  • 6.1 Introduction 213
  • 6.2 MEMS Actuators 213
  • 6.2.1 Structures of MEMS Actuators 213
  • 6.2.2 Electrostatically and Thermally Actuated Devices 213
  • 6.3 Modeling MEMS Structure and Solution 219
  • 6.4 Effects of Surface Forces and Surface Roughness on MEMS Actuators 226
  • 6.5 System Control of MEMS Actuators and Nonlinear Analysis 233
  • 6.6 Research and Development of Emerging MEMS 242
  • References 253
  • Index 259.