Microsystem dynamics : principles and applications /

Discover a comprehensive look at the principles and applications of microsystem dynamics Microsystems or microelectromechanical systems (MEMS) are miniaturized devices with components measured in micrometers that perform micro- to nanometer scale electronic machine functions such as actuations. Sinc...

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Bibliographic Details

Main Authors:	Chen, Gang (Mechanical engineer) (Author), Xu, Jianfeng (Author)
Format:	eBook
Language:	English
Published:	Hoboken : John Wiley & Sons, 2015.
Series:	Microsystem and nanotechnology series
Subjects:	Microelectromechanical systems. Microelectronics.
Online Access:	Connect to the full text of this electronic book