Handbook of chemicals and gases for the semiconductor industry /
The fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition, and polishing. The Handbook of Chemicals and Gases for the Semiconductor Industry is a convenient source of information on the properties, appli...
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| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Language Notes: | English. |
| Published: |
New York :
Wiley-VCH,
©2002.
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| Online Access: | Connect to the full text of this electronic book |
Internet
Connect to the full text of this electronic bookAvailable Online
| Call Number: |
TP201 .M57 2002 |
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| Call Number | Status | Get It |
| TP201 .M57 2002 | Available | |