EUV lithography /

"Extreme ultraviolet lithography (EUVL) is the principal lithography technology aiming to manufacture computer chips beyond the current 193-nm-based optical lithography, and recent progress has been made on several fronts: EUV light sources, optics, optics metrology, contamination control, mask...

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Bibliographic Details

Corporate Author:	Knovel (Firm)
Other Authors:	Bakshi, Vivek (Editor)
Format:	eBook
Language:	English
Published:	Bellingham, Washington, USA : SPIE Press, [2018]
Edition:	Second edition.
Series:	SPIE Press monograph ; PM283.
Subjects:	Ultraviolet radiation > Industrial applications. Photolithography. Optical coatings. Rayonnement ultraviolet > Applications industrielles. Photolithographie. Revêtements optiques. photolithography. Optical coatings Photolithography Ultraviolet radiation > Industrial applications Electronic books.
Online Access:	Connect to the full text of this electronic book