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Run-to-run control in semiconductor manufacturing /

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Bibliographic Details
Corporate Authors: CRC Press, Taylor & Francis
Other Authors: Moyne, James, Del Castillo, Enrique, Hurwitz, Arnon Max
Format: eBook
Language:English
Published: Boca Raton : CRC Press, 2001.
Subjects:
Semiconductors > Design and construction.
Semiconductor industry > Production control.
Electronic packaging.
Production management.
Semi-conducteurs > Industrie > Production > Contrôle.
Mise sous boîtier (Électronique)
Production > Gestion.
Electronic packaging
Production management
Semiconductor industry > Production control
Semiconductors > Design and construction
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Physical Description:1 online resource (348 pages) : illustrations.
Bibliography:Includes bibliographical references and index.
ISBN:0849311780
9780849311789
1420040669
9781420040661
6610652880
9786610652884