Run-to-run control in semiconductor manufacturing /

Bibliographic Details
Corporate Authors:	CRC Press, Taylor & Francis
Other Authors:	Moyne, James, Del Castillo, Enrique, Hurwitz, Arnon Max
Format:	eBook
Language:	English
Published:	Boca Raton : CRC Press, 2001.
Subjects:	Semiconductors > Design and construction. Semiconductor industry > Production control. Electronic packaging. Production management. Semi-conducteurs > Industrie > Production > Contrôle. Mise sous boîtier (Électronique) Production > Gestion. Electronic packaging Production management Semiconductor industry > Production control Semiconductors > Design and construction Electronic books.
Online Access:	Connect to the full text of this electronic book

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