CRC Press, Taylor & Francis, Moyne, J., Del Castillo, E., & Hurwitz, A. M. (2001). Run-to-run control in semiconductor manufacturing. CRC Press.
Chicago Style (17th ed.) CitationCRC Press, Taylor & Francis, James Moyne, Enrique Del Castillo, and Arnon Max Hurwitz. Run-to-run Control in Semiconductor Manufacturing. Boca Raton: CRC Press, 2001.
MLA (9th ed.) CitationCRC Press, et al. Run-to-run Control in Semiconductor Manufacturing. CRC Press, 2001.
Warning: These citations may not always be 100% accurate.