Nano- and Micro-Electromechanical Systems

Annotation

Bibliographic Details

Main Author:	Lyshevski, Sergey Edward (Author)
Corporate Author:	Taylor & Francis
Format:	eBook
Language:	English
Published:	Boca Raton : Florence : CRC Press LLC Taylor & Francis Group [distributor] Jan. 2005
Edition:	2nd ed., revised.
Subjects:	Microelectronics. Electromechanical devices. Microélectronique. Dispositifs électromécaniques. microelectronics. Electronic books.
Online Access:	Connect to the full text of this electronic book