Manufacturing techniques for microfabrication and nanotechnology /

Bibliographic Details
Main Author:	Madou, Marc J. (Author)
Corporate Author:	Taylor & Francis
Format:	eBook
Language:	English
Published:	Boca Raton, FL : Taylor and Francis, an imprint of CRC Press, 2011.
Edition:	First edition.
Subjects:	Microelectromechanical systems. Microfluidics. Nanoelectromechanical systems. Solid state physics. Micro-Electrical-Mechanical Systems Microfluidics Microsystèmes électromécaniques. Microfluidique. Nanosystèmes électromécaniques. Physique de l'état solide. TECHNOLOGY & ENGINEERING > Electronics > Microelectronics. TECHNOLOGY & ENGINEERING > Manufacturing. Microelectromechanical systems Nanoelectromechanical systems Solid state physics Electronic books.
Online Access:	Connect to the full text of this electronic book

Table of Contents:

Chapter 1 Photolithography
chapter 2 Next-Generation Lithographies and Lithography Research
chapter 3 Dry Etching
chapter 4 Wet Chemical Etching and Wet Bulk Micromachining--Pools as Tools
chapter 5 Thermal Energy-Based Removing
chapter 6 MechanicalEnergy-Based Removing
chapter 7 Physical and Chemical Vapor Deposition--Thin Film Properties and Surface Micromachining
chapter 8 Chemical, Photochemical, and Electrochemical Forming Techniques
chapter 9 Thermal Energy-Based Forming Techniques--Thermoforming
chapter 10 Micromolding Techniques--LIGA.