Manufacturing techniques for microfabrication and nanotechnology /

Bibliographic Details
Main Author:	Madou, Marc J. (Author)
Corporate Author:	Taylor & Francis
Format:	eBook
Language:	English
Published:	Boca Raton, FL : Taylor and Francis, an imprint of CRC Press, 2011.
Edition:	First edition.
Subjects:	Microelectromechanical systems. Microfluidics. Nanoelectromechanical systems. Solid state physics. Micro-Electrical-Mechanical Systems Microfluidics Microsystèmes électromécaniques. Microfluidique. Nanosystèmes électromécaniques. Physique de l'état solide. TECHNOLOGY & ENGINEERING > Electronics > Microelectronics. TECHNOLOGY & ENGINEERING > Manufacturing. Microelectromechanical systems Nanoelectromechanical systems Solid state physics Electronic books.
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