Manufacturing techniques for microfabrication and nanotechnology /

Bibliographic Details
Main Author:	Madou, Marc J. (Author)
Corporate Author:	Taylor & Francis
Format:	eBook
Language:	English
Published:	Boca Raton, FL : Taylor and Francis, an imprint of CRC Press, 2011.
Edition:	First edition.
Subjects:	Microelectromechanical systems. Microfluidics. Nanoelectromechanical systems. Solid state physics. Micro-Electrical-Mechanical Systems Microfluidics Microsystèmes électromécaniques. Microfluidique. Nanosystèmes électromécaniques. Physique de l'état solide. TECHNOLOGY & ENGINEERING > Electronics > Microelectronics. TECHNOLOGY & ENGINEERING > Manufacturing. Microelectromechanical systems Nanoelectromechanical systems Solid state physics Electronic books.
Online Access:	Connect to the full text of this electronic book

Description
Abstract:	Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
Physical Description:	1 online resource (670 pages) : 737 illustrations
Bibliography:	Includes bibliographical references and index.
ISBN:	9781439895306 1439895309 9780429112461 0429112467