Plasma electronics : applications in microelectronic device fabrication /

Bibliographic Details

Main Authors:	Makabe, T. (Toshiaki) (Author), Petrović, Z. (Author)
Corporate Author:	Taylor & Francis
Format:	eBook
Language:	English
Published:	Boca Raton, FL : CRC Press, Taylor & Francis Group, 2014.
Edition:	Second edition.
Subjects:	Plasma engineering. Technique des plasmas. Electronic books.
Online Access:	Connect to the full text of this electronic book