Microengineering, MEMS, and interfacing : a practical guide /

MICROMACHINING. IntroductionPhotolithography. Introduction. UV Photolithography. X-Ray Lithography. Direct-Write (E-Beam) Lithography. Low-Cost Photolithography. Photolithography-Key Points. ReferencesSilicon Micromachining. Introduction. Silicon. Crystal Growth. Doping. Wafer Specifications. Thin F...

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Bibliographic Details

Main Author:	Banks, Danny
Corporate Author:	Taylor & Francis
Format:	eBook
Language:	English
Published:	Boca Raton, FL : Dekker/CRC Press, 2006.
Subjects:	Microelectromechanical systems. Micro-Electrical-Mechanical Systems Microsystèmes électromécaniques. Microelectromechanical systems Electronic books.
Online Access:	Connect to the full text of this electronic book