Handbook of thin film deposition : theory, technology and semiconductor applications.
Handbook of Thin Film Deposition: Theory, Technology and Semiconductor Applications, Fifth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film microproperties, fe...
| Uniform Title: | Handbook of thin-film deposition processes and techniques. |
|---|---|
| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Amsterdam ; Cambridge, Massachusetts :
Elsevier,
[2025].
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| Edition: | Fifth edition / |
| Subjects: |
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