Handbook of thin film deposition : theory, technology and semiconductor applications.
Handbook of Thin Film Deposition: Theory, Technology and Semiconductor Applications, Fifth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film microproperties, fe...
Full description
Bibliographic Details
| Uniform Title: | Handbook of thin-film deposition processes and techniques. |
|---|
| Other Authors: |
Seshan, Krishna
(Editor),
Schepis, Dominic
(Editor) |
|---|
| Format: | Book
|
|---|
| Language: | English |
|---|
| Published: |
Amsterdam ; Cambridge, Massachusetts :
Elsevier,
[2025].
|
|---|
| Edition: | Fifth edition / |
|---|
| Subjects: | |
|---|