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Handbook of thin film deposition : theory, technology and semiconductor applications.

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Handbook of Thin Film Deposition: Theory, Technology and Semiconductor Applications, Fifth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film microproperties, fe...

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Bibliographic Details
Uniform Title:Handbook of thin-film deposition processes and techniques.
Other Authors: Seshan, Krishna (Editor), Schepis, Dominic (Editor)
Format: Book
Language:English
Published: Amsterdam ; Cambridge, Massachusetts : Elsevier, [2025].
Edition:Fifth edition /
Subjects:
Thin films.
Thin film devices > Design and construction.

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