Handbook of thin film deposition : theory, technology and semiconductor applications.
Handbook of Thin Film Deposition: Theory, Technology and Semiconductor Applications, Fifth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film microproperties, fe...
| Uniform Title: | Handbook of thin-film deposition processes and techniques. |
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| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Amsterdam ; Cambridge, Massachusetts :
Elsevier,
[2025].
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| Edition: | Fifth edition / |
| Subjects: |
| Summary: | Handbook of Thin Film Deposition: Theory, Technology and Semiconductor Applications, Fifth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film microproperties, ferroelectric films, LED research and materials for memory applications, and other thin film applications. Of particular note in this new edition is the coverage of “reduction to practice,” a phase where the idea for a technology transitions from a concept to actual implementation. This section includes chapters that review the most relevant methods to fabricate thin films toward practical applications. This book also discusses the latest applications of various thin film deposition technologies. |
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| Item Description: | Previous edition: Oxford: William Andrew, 2018. |
| Physical Description: | 518 pages : chiefly color illustrations ; 23 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9780443135231 0443135231 |