APA (7th ed.) Citation

Seshan, K., & Schepis, D. (2025). Handbook of thin film deposition: Theory, technology and semiconductor applications (Fifth edition.). Elsevier.

Chicago Style (17th ed.) Citation

Seshan, Krishna, and Dominic Schepis. Handbook of Thin Film Deposition: Theory, Technology and Semiconductor Applications. Fifth edition. Amsterdam ; Cambridge, Massachusetts: Elsevier, 2025.

MLA (9th ed.) Citation

Seshan, Krishna, and Dominic Schepis. Handbook of Thin Film Deposition: Theory, Technology and Semiconductor Applications. Fifth edition. Elsevier, 2025.