Stress and strain engineering at nanoscale in semiconductor devices /
Anticipating a limit to the continuous miniaturization (More-Moore), intense research efforts are being made to co-integrate various functionalities (More-than-Moore) in a single chip. Currently, strain engineering is the main technique used to enhance the performance of advanced semiconductor devic...
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| Format: | eBook |
| Language: | English |
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Boca Raton, FL :
CRC Press,
2021.
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| Online Access: | Connect to the full text of this electronic book |
Internet
Connect to the full text of this electronic bookAvailable Online
| Call Number: |
TA405TA417.6 .M35 2021 |
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| Call Number | Status | Get It |
| TA405TA417.6 .M35 2021 | Available | |