Materials processing by cluster ion beams : history, technology, and applications /

Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing. Written by the originator of the gas cluster ion beam (GCIB) concept, this b...

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Bibliographic Details
Main Author: Yamada, I. (Isao) (Author)
Corporate Author: Taylor & Francis
Format: eBook
Language:English
Published: Boca Raton, FL : CRC Press, [2016]
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Call Number: TA418.6 .Y36 2015
 
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TA418.6 .Y36 2015 Available