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Defects in microelectronic materials and devices /

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Uncover the Defects that Compromise Performance and ReliabilityAs microelectronics features and devices become smaller and more complex, it is critical that engineers and technologists completely understand how components can be damaged during the increasingly complicated fabrication processes requi...

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Bibliographic Details
Corporate Author: Taylor & Francis
Other Authors: Fleetwood, D. M. (Dan M.), Pantelides, Sokrates T., Schrimpf, Ronald Donald
Format: eBook
Language:English
Language Notes:English.
Published: Boca Raton : CRC Press, ©2009.
Subjects:
Microelectronics > Materials > Testing.
Metal oxide semiconductor field-effect transistors > Testing.
Integrated circuits > Defects.
Circuits intégrés > Défauts.
TECHNOLOGY & ENGINEERING > Electronics > Microelectronics.
TECHNOLOGY & ENGINEERING > Electronics > Digital.
Integrated circuits > Defects
Metal oxide semiconductor field-effect transistors > Testing
Microelectronics > Materials > Testing
Mikroelektronik.
Integrerade kretsar.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Summary:Uncover the Defects that Compromise Performance and ReliabilityAs microelectronics features and devices become smaller and more complex, it is critical that engineers and technologists completely understand how components can be damaged during the increasingly complicated fabrication processes required to produce them.A comprehensive survey of defects that occur in silicon-based metal-oxide semiconductor field-effect transistor (MOSFET) technologies, this book also discusses flaws in linear bipolar technologies, silicon carbide-based devices, and gallium a.
Physical Description:1 online resource (1 volume (various pagings)) : illustrations
Bibliography:Includes bibliographical references.
ISBN:9781420043761
1420043765
9781420043778
1420043773
0429190913
9780429190919
9786611892197
6611892192