Defects in microelectronic materials and devices /

Uncover the Defects that Compromise Performance and ReliabilityAs microelectronics features and devices become smaller and more complex, it is critical that engineers and technologists completely understand how components can be damaged during the increasingly complicated fabrication processes requi...

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Bibliographic Details
Corporate Author: Taylor & Francis
Other Authors: Fleetwood, D. M. (Dan M.), Pantelides, Sokrates T., Schrimpf, Ronald Donald
Format: eBook
Language:English
Language Notes:English.
Published: Boca Raton : CRC Press, ©2009.
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Call Number: TK7871 .D44 2009eb
 
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