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Microlithography : science and technology /

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"Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices"--

Bibliographic Details
Corporate Author: Taylor & Francis
Other Authors: Smith, Bruce W., 1959- (Editor), Suzuki, Kazuaki (Editor)
Format: eBook
Language:English
Published: Boca Raton : CRC Press, 2020.
Edition:Third edition.
Subjects:
Microlithography > Industrial applications.
Integrated circuits > Masks.
Metal oxide semiconductors, Complementary > Design and construction.
Manufacturing processes.
Microlithographie > Applications industrielles.
Circuits intégrés > Masques.
Fabrication.
manufacturing.
TECHNOLOGY > Lasers.
TECHNOLOGY > Electronics > Microelectronics.
Integrated circuits > Masks
Manufacturing processes
Metal oxide semiconductors, Complementary > Design and construction
Microlithography > Industrial applications
Electronic books.
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Call Number: TK7836
 
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TK7836 Available