Fundamentals of microfabrication and nanotechnology /

Historical Note: The Ascent of Silicon, MEMS, and NEMS CrystallographyIntroductionBravais Lattice, Unit Cells, and the BasisPoint Groups and Space GroupsMiller IndicesX-Ray AnalysisReciprocal Space, Fourier Space, k-Space, or Momentum SpaceBrillouin ZonesNothing Is PerfectAcknowledgmentsAppendix 2A:...

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Bibliographic Details

Main Author:	Madou, Marc J. (Author)
Corporate Author:	Taylor & Francis
Format:	eBook
Language:	English
Published:	Boca Raton, FL : CRC Press, [2011]
Edition:	Third edition.
Subjects:	Microelectromechanical systems. Nanoelectromechanical systems. Microfluidics. Solid state physics. Micro-Electrical-Mechanical Systems Microfluidics Microsystèmes électromécaniques. Nanosystèmes électromécaniques. Microfluidique. Physique de l'état solide. Microelectromechanical systems Nanoelectromechanical systems Solid state physics Electronic books.
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