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Optical inspection of microsystems /

Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued...

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Bibliographic Details
Corporate Author: Taylor & Francis
Other Authors: Osten, Wolfgang (Editor)
Format: eBook
Language:English
Published: Boca Raton, FL : CRC Press/Taylor & Francis Group, [2020]
Edition:Second edition.
Subjects:
Microelectromechanical systems > Inspection.
Quality control > Optical methods.
Optical measurements.
Industrial microscopy.
Microsystèmes électromécaniques > Inspection.
Qualité > Contrôle > Méthodes optiques.
Mesures optiques.
Microscopie industrielle.
TECHNOLOGY & ENGINEERING > Industrial Engineering.
TECHNOLOGY & ENGINEERING > Industrial Technology.
TECHNOLOGY & ENGINEERING > Manufacturing.
TECHNOLOGY & ENGINEERING > Technical & Manufacturing Industries & Trades.
Industrial microscopy
Optical measurements
Quality control > Optical methods
Electronic books.
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Call Number: TK7874.58
 
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