Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices /

In the development of next-generation nanoscale devices, higher speed and lower power operation is the name of the game. Increasing reliance on mobile computers, mobile phone, and other electronic devices demands a greater degree of speed and power. As chemical mechanical planarization (CMP) progres...

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Bibliographic Details

Main Author:	Paik, Ungyu
Corporate Author:	Taylor & Francis
Other Authors:	Park, Jea-Gun
Format:	eBook
Language:	English
Published:	[Place of publication not identified] : CRC Press, 2019.
Subjects:	Chemical mechanical planarization. Nanoparticles. Nanoelectronics. Nanoparticles Planarisation chimicomécanique. Nanoparticules. Nanoélectronique. SCIENCE / Chemistry / Industrial & Technical TECHNOLOGY / Electronics / Microelectronics TECHNOLOGY / Engineering / Chemical & Biochemical Chemical mechanical planarization Nanoelectronics Electronic books.
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