Scanning probe lithography : fundamentals, materials, and applications /

The most complete book available on scanning probe lithography (SPL), this work details the modalities, mechanisms, and current technologies, applications, and materials on which SPL can be performed. It provides a comprehensive overview of this simple and cost-effective technique, which does not re...

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Bibliographic Details

Main Authors:	Ryu, Yu Kyoung (Author), Martínez Rodrigo, Javier (Author)
Corporate Author:	Taylor & Francis
Format:	eBook
Language:	English
Published:	Boca Raton : CRC Press, 2023.
Series:	Emerging materials and technologies
Subjects:	Microlithography > Industrial applications. Scanning probe microscopy > Industrial applications. Microlithographie > Applications industrielles. Microscopie à sonde à balayage > Applications industrielles. TECHNOLOGY / Nanotechnology TECHNOLOGY / Electronics / Microelectronics TECHNOLOGY / Engineering / Chemical & Biochemical Microlithography > Industrial applications Electronic books.
Online Access:	Connect to the full text of this electronic book