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MEMS : design and fabrication /

"As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. T...

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Bibliographic Details
Corporate Author: Taylor & Francis
Other Authors: Gad-el-Hak, Mohamed, 1945-
Format: eBook
Language:English
Published: Boca Raton, FL : CRC/Taylor & Francis, 2006.
Edition:2nd ed.
Series:Mechanical engineering series (Boca Raton, Fla.)
Subjects:
Microelectromechanical systems > Design and construction.
Microfabrication.
TECHNOLOGY & ENGINEERING > Electronics > Microelectronics.
TECHNOLOGY & ENGINEERING > Electronics > Digital.
Microelectromechanical systems > Design and construction
Microfabrication
Electronic books.
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Call Number: TK7875 .M444 2005
 
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TK7875 .M444 2005 Available