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Semiconductor industry : wafer fab exhaust management /

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Bibliographic Details
Main Author: Sherer, J. Michael, 1958-
Corporate Author: Taylor & Francis
Format: eBook
Language:English
Published: Boca Raton : CRC/Taylor & Francis, 2005.
Subjects:
Air > Purification > Technological innovations.
Semiconductor industry > Environmental aspects.
Semiconductor wafers > Design and construction.
Volatile organic compounds > Environmental aspects.
Air > Épuration > Innovations.
Semi-conducteurs > Industrie > Aspect de l'environnement.
Composés organiques volatils > Aspect de l'environnement.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
Air > Purification > Technological innovations
Semiconductor industry > Environmental aspects
Semiconductor wafers > Design and construction
Volatile organic compounds > Environmental aspects
Electronic books.
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • Preface; The Author; Contents; List of Acronyms; 1 Semiconductor and Wafer Manufacturing Facilities; 2 Exhaust Types and Challenges; 3 Point-Of-Use Devices and Exhaust-Line Requirements; 4 Centralized Scrubbers; 5 Centralized Equipment to Control Volatile Organic Compounds; 6 Emergency Releases; 7Exhaust Management and Air Abatement Equipment Examples; Index.