Semiconductor industry : wafer fab exhaust management /

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Bibliographic Details
Main Author:	Sherer, J. Michael, 1958-
Corporate Author:	Taylor & Francis
Format:	eBook
Language:	English
Published:	Boca Raton : CRC/Taylor & Francis, 2005.
Subjects:	Air > Purification > Technological innovations. Semiconductor industry > Environmental aspects. Semiconductor wafers > Design and construction. Volatile organic compounds > Environmental aspects. Air > Épuration > Innovations. Semi-conducteurs > Industrie > Aspect de l'environnement. Composés organiques volatils > Aspect de l'environnement. TECHNOLOGY & ENGINEERING > Electronics > Solid State. TECHNOLOGY & ENGINEERING > Electronics > Semiconductors. Air > Purification > Technological innovations Semiconductor industry > Environmental aspects Semiconductor wafers > Design and construction Volatile organic compounds > Environmental aspects Electronic books.
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