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Semiconductor industry : wafer fab exhaust management /

Annotation

Bibliographic Details
Main Author: Sherer, J. Michael, 1958-
Corporate Author: Taylor & Francis
Format: eBook
Language:English
Published: Boca Raton : CRC/Taylor & Francis, 2005.
Subjects:
Air > Purification > Technological innovations.
Semiconductor industry > Environmental aspects.
Semiconductor wafers > Design and construction.
Volatile organic compounds > Environmental aspects.
Air > Épuration > Innovations.
Semi-conducteurs > Industrie > Aspect de l'environnement.
Composés organiques volatils > Aspect de l'environnement.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
Air > Purification > Technological innovations
Semiconductor industry > Environmental aspects
Semiconductor wafers > Design and construction
Volatile organic compounds > Environmental aspects
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Summary:Annotation
Physical Description:1 online resource (194 pages)
Bibliography:Includes bibliographical references and index.
ISBN:1574447203
9781574447200
1420027190
9781420027198
9781315221052
1315221055
9781351828253
1351828258