APA (7th ed.) Citation

Sherer, J. M. (2005). Semiconductor industry: Wafer fab exhaust management. CRC/Taylor & Francis.

Chicago Style (17th ed.) Citation

Sherer, J. Michael. Semiconductor Industry: Wafer Fab Exhaust Management. Boca Raton: CRC/Taylor & Francis, 2005.

MLA (9th ed.) Citation

Sherer, J. Michael. Semiconductor Industry: Wafer Fab Exhaust Management. CRC/Taylor & Francis, 2005.

Warning: These citations may not always be 100% accurate.