MEMS Silicon Oscillating Accelerometers and Readout Circuits

Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the ca...

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Bibliographic Details

Main Author:	Xu, Yong Ping
Corporate Author:	Taylor & Francis
Format:	eBook
Language:	English
Published:	Aalborg : River Publishers, 2019.
Series:	River Publishers series in circuits and systems.
Subjects:	Accelerometers. Microelectromechanical systems. Accéléromètres. Microsystèmes électromécaniques. accelerometers. SCIENCE / Energy TECHNOLOGY / Electronics / Microelectronics Accelerometers Microelectromechanical systems Electronic books.
Online Access:	Connect to the full text of this electronic book