MEMS : introduction and fundamentals /

"As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most c...

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Bibliographic Details

Corporate Author:	Taylor & Francis
Other Authors:	Gad-el-Hak, Mohamed, 1945-
Format:	eBook
Language:	English
Published:	Boca Raton : CRC/Taylor & Francis, 2006.
Edition:	2nd ed.
Series:	Mechanical engineering series (Boca Raton, Fla.)
Subjects:	Microelectromechanical systems. Microelectronics. Nanotechnology. Microsystèmes électromécaniques. Microélectronique. Nanotechnologie. microelectronics. Microelectromechanical systems Microelectronics Nanotechnology Electronic books.
Online Access:	Connect to the full text of this electronic book