Polymers in microlithography : materials and processes : developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989 /
| Corporate Authors: | , |
|---|---|
| Other Authors: | , , |
| Format: | eBook |
| Language: | English |
| Published: |
Washington, DC :
American Chemical Society,
1989.
|
| Series: | ACS symposium series ;
412. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Title from PDF title page (ACS publications, viewed September 8, 2009). |
|---|---|
| Physical Description: | 1 online resource (xii, 449 pages) : illustrations |
| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 9780841212688 0841212686 |