Polymers in microlithography : materials and processes : developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989 /

Bibliographic Details
Corporate Authors:	American Chemical Society. Division of Polymeric Materials: Science and Engineering, American Chemical Society. Meeting
Other Authors:	Reichmanis, Elsa, 1953-, MacDonald, Scott A., Iwayanagi, Takao, 1949-
Format:	eBook
Language:	English
Published:	Washington, DC : American Chemical Society, 1989.
Series:	ACS symposium series ; 412.
Subjects:	Polymers > Congresses. Photoresists > Congresses. Microlithography > Materials > Congresses. Polymers. Polymers Polymères > Congrès. Résines photosensibles > Congrès. Microlithographie > Matériaux > Congrès. Polymères. polymers. TECHNOLOGY & ENGINEERING > Textiles & Polymers. Microlithography > Materials Photoresists Electronic books. Congress proceedings (reports) Conference papers and proceedings Conference papers and proceedings. Actes de congrès.
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