Cover Image

Polymers for microelectronics : resists and dielectrics : developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992 /

Bibliographic Details
Corporate Authors: American Chemical Society. Division of Polymeric Materials: Science and Engineering, Kōbunshi Gakkai (Japan), American Chemical Society. Meeting
Other Authors: Thompson, L. F., 1944-, Willson, C. G. (C. Grant), 1939-, Tagawa, Seiichi
Format: eBook
Language:English
Published: Washington, DC : American Chemical Society, 1994.
Series:ACS symposium series ; 537.
Subjects:
Microelectronics > Materials > Congresses.
Polymers > Congresses.
Dielectrics > Congresses.
Photoresists > Congresses.
Microélectronique > Matériaux > Congrès.
Polymères > Congrès.
Diélectriques > Congrès.
Résines photosensibles > Congrès.
TECHNOLOGY & ENGINEERING > Mechanical.
Photoresists
Dielectrics
Microelectronics > Materials
Polymers
Polymeren.
Micro-elektronica.
Microélectronique > Matériaux.
Polymères.
Polyimides.
Diélectriques.
Electronic books.
Conference papers and proceedings
Online Access:Connect to the full text of this electronic book
Description
Item Description:Title from PDF title page (ACS publications, viewed September 1, 2009).
Physical Description:1 online resource (xii, 571 pages) : illustrations
Format:Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
Bibliography:Includes bibliographical references and indexes.
ISBN:9780841213937
0841213933